About Products

Application Field

Semi-Conductor or LCD/TFT Processing, Amorphous Silicon Thin Film Solar Battery Process, etc.

Characteristic

  • Appearance & Size : Granules (4x8 mesh)
  • Color : Dark navy
  • Bulk density : ~0.4g/cc
  • Crush strength : > 4.0 kgf/㎠
  • Recomm. operating temp. : 400~800℃
  • Upper temp. limit : < 1,000℃

Appearance

Reaction Mechanism

Gas Mechanism
NF3, CHF3, SF6, CF4, C2F6, C3F8, c-C4F8 XFn +M → MF + XO(XO2)
XFn + H2O → HF + XO(XO2)

PFC Destruction – Effects of PFC