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Chemical Adsorbents based
on an Impregnated Activated
Carbon/Metal Oxides - Chemical Adsorbents based on Zeolite
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Application Field
Ion Implant Process, Ashing and Etching Process, Epi Process, Some Chemical Vapor Deposition(CVD) Process, For reducing of SiH4 gas, etc.
Characteristic
- Appearance & Size : Pellet (ø=3.0, more)
- Color : Purple
- Bulk density : 0.70~0.75g/cc
- Crush strength : > 2.0kgf/㎠
- Upper temp. limit : < 100℃
Appearance
Reaction Mechanism
| Gas | Mechanism | TLV (ppm) |
|---|---|---|
| SiH4 | SiH4 + 2MOH → M2Si + 2H2O + H2 | 5 |