About Products

Application Field

이온주입(Ion Implant)공정, 에슁(Ashing)/에칭(Etching)공정, Epi공정, 화학증착(CVD)공정, SiH4 등 가스제거용

Characteristic

  • Appearance & Size : Pellet (ø=3.0, more)
  • Color : Purple
  • Bulk density : 0.70~0.75g/cc
  • Crush strength : > 2.0kgf/㎠
  • Upper temp. limit : < 100℃

Appearance

Reaction Mechanism

Gas Mechanism TLV (ppm)
SiH4 SiH4 + 2MOH → M2Si + 2H2O + H2 5