GREEN WORLD WITH HANSO
Application Field
이온주입(Ion Implant)공정, 에슁(Ashing)공정, Epi공정, 화학증착(CVD)공정, Cl2, F2 등 산성가스 제거용
Characteristic
Appearance
Reaction Mechanism
Gas | Mechanism | TLV (ppm) |
---|---|---|
Cl2 | Cl2 + 2MOH → 2MCl + H2O + 1/2O2 | 1 |
Cl2 + M(OH)2 → MCl2 + H2O + 1/2O2 |