About Products

Application Field

Ion Implant Process, Ashing Process, Epi Process, Chemical Vapor Deposition(CVD) Process, For reducing of Acid Vapors such as HCl, HF, HBr, BCl3, etc.

Characteristic

  • Appearance & Size : Pellet (ø=4.0, more)
  • Color : Brown
  • Bulk density : 0.6~0.7g/cc
  • Crush strength : > 4kgf/㎠
  • Upper temp. limit : < 100℃

Appearance

Reaction Mechanism

Gas Mechanism TLV (ppm)
BCl3 BCl3 + 3MOH → 3MCl + B(OH)3 5
BCl3 + 3MO(OH) → 3MOCl + B(OH)
HBr 2HBr + M(OH)2 → MBr2+ 2H2O 3
HCl 3HCl + MO(OH) →MCl3 + 2H2O 5
HF 6HF + M2O3 → 2MF3 + 3H2O 3
SiH4 SiH4 + 2MOH →M2Si + 2H2O + H2 5