About Products

Area penerapan

Proses implant ion(ion implant), proses pengabuan(ashing), proses epi, proses pengendapan uap kimia(CVD), penyaring gas asam seperti Cl2, F2 dan lain-lain

Kekhususan produk

  • Appearance & Size : Pellet (ø=2.2, more)
  • Color : White
  • Bulk density : 0.6~0.7g/cc
  • Crush strength : > 2.0kgf/㎠
  • Upper temp. limit : < 100℃

Appearance

Mekanisme reaksi

Gas Mechanism TLV (ppm)
Cl2 Cl2 + 2MOH → 2MCl + H2O + 1/2O2 1
Cl2 + M(OH)2 → MCl2 + H2O + 1/2O2