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Application Field
이온주입(Ion Implant)공정, 에슁(Ashing)공정, Epi공정, 화학증착(CVD)공정, Cl2, F2 등 산성가스 제거용
Characteristic
- Appearance & Size : Pellet (ø=2.2, more)
- Color : White
- Bulk density : 0.6~0.7g/cc
- Crush strength : > 2.0kgf/㎠
- Upper temp. limit : < 100℃
Appearance
Reaction Mechanism
| Gas | Mechanism | TLV (ppm) |
|---|---|---|
| Cl2 | Cl2 + 2MOH → 2MCl + H2O + 1/2O2 | 1 |
| Cl2 + M(OH)2 → MCl2 + H2O + 1/2O2 |