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Application Field
확산(Diffusion)공정, 화학증착(CVD)공정 등, H2S, H2Se, PH3, AsH3 등 가스제거용
Characteristic
- Appearance & Size : Pellet (ø=3.0, more)
- Color : Light blue
- Bulk density : 0.8g/cc
- Crush strength : > 2.0kgf/㎠
- Upper temp. limit : < 50℃
Appearance
Reaction Mechanism
| Gas | Mechanism | TLV (ppm) |
|---|---|---|
| H2S | Cu(OH)2 + H2S → CuHS + 2H2O | 5 |
| 2Cu(OH)2 + H2S → Cu2S + 4H2O |