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Application Field
확산(Diffusion)공정, 화학증착(CVD)공정 등, NH3, TMA, Amino-silane 등 염기성가스 제거용
Characteristic
- Appearance & Size : Pellet (ø=4.0, more)
- Color : Light brown
- Bulk density : 0.8g/cc
- Crush strength : > 4.0kgf/㎠
- Upper temp. limit : < 100℃
Appearance
Reaction Mechanism
| Gas | Mechanism | TLV (ppm) |
|---|---|---|
| NH3 | 4NH3 + MSO4 →M(NH3)4SO4 | 25 |