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Chemical Adsorbents based
on an Impregnated Activated
Carbon/Metal Oxides - Chemical Adsorbents based on Zeolite
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Application Field
Ion Implant Process, Ashing Process, Epi Process, Chemical Vapor Deposition(CVD) Process, For reducing of Acid Vapors such as HCl, HF, HBr, BCl3, etc.
Characteristic
- Appearance & Size : Pellet (ø=4.0, more)
- Color : Brown
- Bulk density : 0.6~0.7g/cc
- Crush strength : > 4kgf/㎠
- Upper temp. limit : < 100℃
Appearance
Reaction Mechanism
| Gas | Mechanism | TLV (ppm) |
|---|---|---|
| BCl3 | BCl3 + 3MOH → 3MCl + B(OH)3 | 5 |
| BCl3 + 3MO(OH) → 3MOCl + B(OH) | ||
| HBr | 2HBr + M(OH)2 → MBr2+ 2H2O | 3 |
| HCl | 3HCl + MO(OH) →MCl3 + 2H2O | 5 |
| HF | 6HF + M2O3 → 2MF3 + 3H2O | 3 |
| SiH4 | SiH4 + 2MOH →M2Si + 2H2O + H2 | 5 |