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Applications
- A device installed on the outlet side of a vacuum pump or at the inlet side of a scrubber to remove condensable by-products from Semiconductor / Display / photovoltaic manufacturing processes
- Efficiency monitoring systems & interlocks possible
Characteristic
- Optimized designs for maximum trapping efficiency depending on processes & materials
- Optimized designs for minimum discharge of by-product substances
- Simple installation and practical usability via flange mounting (KF, etc.)
- Re-useable after cleaning service of internal components
- No or less heating at exhaust lines (between vacuum pumps and abatements)
- Saving energy at foreline, exhaust pipe and abatements
- Less clogging at abatements
- Reduction of nitrogen gas consumption at and after pumps
- Lower cost of operations with maintenance (Lower cost of ownership)
- Longer tool uptime
Specification
Category |
Details |
|
|---|---|---|
General |
Model |
CT |
Material |
SUS304 |
|
Size (liter) |
30, 40, 60, >100 |
|
Main Functions |
· Removes by-products and residual gases generated during processes · Prevents backpressure and clogging in the pump outlet piping · Prevents clogging at the scrubber inlet |
|
Main Applications |
Diffusion (SiN, TiNx), F CVD, Bosch & metal Etch, some etches, some ALDs, ULK, organic precursors, any processes generating condensable substances |
|
