Applications
Characteristic
Specification
Category |
Details |
|
---|---|---|
General |
Scrubber method |
Multipurpose Wet / Hybrid Scrubbing |
Capacity |
100~500LPM |
|
Size |
300x300x600mm or smaller sizes |
|
Performance |
Treated gas |
HCl, HF, Cl₂, BCl₃, AsH₃, PH₃, HBr, POCl₃, NH₃, SiH₄, GeH₄, "Explosive metal powder", (Large Capacity Removal Equipment) |
Efficiency |
>99% |